Title:
【発明の名称】電子用途用ダイヤモンド載置基板
Document Type and Number:
Japanese Patent JP3136307
Kind Code:
B2
Abstract:
A coated substrate product is disclosed which comprises a substrate and a polycrystalline diamond layer having a smooth surface finish, enhanced crystal orientation in comparison to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. Also disclosed is a method for fabricating such a coated substrate in which the polycrystalline diamond layer is chemically vapor deposited onto the substrate at substrate temperatures in the range of 650 DEG to 825 DEG C.
Inventors:
Garg de walker
Tsai Willman
Dia paul nigel
Chimock Fred M
Iam pietro robert el
Tsai Willman
Dia paul nigel
Chimock Fred M
Iam pietro robert el
Application Number:
JP50727291A
Publication Date:
February 19, 2001
Filing Date:
March 18, 1991
Export Citation:
Assignee:
DIAMONEX INC.
International Classes:
B32B15/04; C04B41/85; C23C16/26; C23C16/27; C30B25/10; B32B9/00; H01L21/205; H01L23/14; (IPC1-7): C23C16/27; B32B9/00; H01L21/205; H01L23/14
Domestic Patent References:
| JP393695A | ||||
| JP3277776A |
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)