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Title:
【発明の名称】成膜方法
Document Type and Number:
Japanese Patent JP3136624
Kind Code:
B2
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Inventors:
Yuko Seki
Application Number:
JP5414991A
Publication Date:
February 19, 2001
Filing Date:
January 30, 1991
Export Citation:
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Assignee:
NEC
International Classes:
H01L21/285; H01L21/28; H01L21/316; H01L21/3205; H01L21/768; (IPC1-7): H01L21/768; H01L21/285; H01L21/316; H01L21/3205
Domestic Patent References:
JP1278044A
Attorney, Agent or Firm:
Yoshiyuki Iwasa



 
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