Title:
【発明の名称】半導体単結晶引き上げ用黒鉛ルツボ
Document Type and Number:
Japanese Patent JP3142722
Kind Code:
B2
Inventors:
Taku Yamazaki
Takeshi Uchida
Nobuaki Minowa
Yuji Taguchi
Takao Nakagawa
Masaharu Tachibana
Mihoko Yamashita
Takeshi Uchida
Nobuaki Minowa
Yuji Taguchi
Takao Nakagawa
Masaharu Tachibana
Mihoko Yamashita
Application Number:
JP21497494A
Publication Date:
March 07, 2001
Filing Date:
September 08, 1994
Export Citation:
Assignee:
Toshiba Denko Co., Ltd.
Across Co., Ltd.
Across Co., Ltd.
International Classes:
C30B15/10; C30B29/06; H01L21/208; (IPC1-7): C30B15/10
Domestic Patent References:
| JP725694A | ||||
| JP769777A | ||||
| JP527910A | ||||
| JP57170892A | ||||
| JP637174U | ||||
| JP27917Y2 | ||||
| JP343250Y2 | ||||
| JP5227880Y1 |
Attorney, Agent or Firm:
Takehiko Suzue