Title:
プラズマ生成用電極
Document Type and Number:
Japanese Patent JP3143290
Kind Code:
U
Abstract:
An electrode with improved plasma uniformity is disclosed, which is used for a chamber capable of generating a plasma. The electrode comprises an electrode plate and a perturbation slot. By well designing the perturbation slot of the electrode, the disclosed electrode can improve the uniformity of the plasma density, and is suitable for use in various types of substrate and can be widely applied in a plasma process system.
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Inventors:
Yellow
Koasa
Yang Masayasu
What erected
Koasa
Yang Masayasu
What erected
Application Number:
JP2008002858U
Publication Date:
July 17, 2008
Filing Date:
May 02, 2008
Export Citation:
Assignee:
Dongji Science & Technology Co., Ltd.
International Classes:
H01L21/205; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Masaki Hattori