Title:
【発明の名称】薄膜トランジスタの製造方法
Document Type and Number:
Japanese Patent JP3147365
Kind Code:
B2
Inventors:
Satoshi Inoue
Application Number:
JP24491690A
Publication Date:
March 19, 2001
Filing Date:
September 14, 1990
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01L21/20; H01L21/28; H01L21/336; H01L29/423; H01L29/43; H01L29/49; H01L29/78; H01L29/786; (IPC1-7): H01L29/786; H01L21/20; H01L29/43
Attorney, Agent or Firm:
Kisaburo Suzuki (1 outside)