Title:
マルチチャンバーを備えた気相エッチング装置
Document Type and Number:
Japanese Patent JP3179625
Kind Code:
U
Inventors:
Chen
Application Number:
JP2012005293U
Publication Date:
November 08, 2012
Filing Date:
August 29, 2012
Export Citation:
Assignee:
Crystal Presentation Technology Co., Ltd.
International Classes:
H01L21/302
Attorney, Agent or Firm:
Sakuo Yamaguchi