Title:
【発明の名称】不純物ドーピングの方法
Document Type and Number:
Japanese Patent JP3180122
Kind Code:
B2
Inventors:
Junichi Nishizawa
Kenji Aoki
Kenji Aoki
Application Number:
JP19673290A
Publication Date:
June 25, 2001
Filing Date:
July 23, 1990
Export Citation:
Assignee:
Junichi Nishizawa
Seiko Instruments Inc.
Japan Science and Technology Agency
Seiko Instruments Inc.
Japan Science and Technology Agency
International Classes:
H01L21/22; H01L21/225; (IPC1-7): H01L21/225
Domestic Patent References:
| JP1186615A | ||||
| JP63166219A | ||||
| JP6358823A | ||||
| JP63249332A | ||||
| JP6052018A |
Attorney, Agent or Firm:
Keinosuke Hayashi