Title:
ドライフィルムレジストの薄膜化処理装置
Document Type and Number:
Japanese Patent JP3186572
Kind Code:
U
Inventors:
Kengo Yamane
Yuji Toyoda
Soto Irizawa
Yoji Anjo
Kunihiro Nakagawa
Yuji Toyoda
Soto Irizawa
Yoji Anjo
Kunihiro Nakagawa
Application Number:
JP2013003866U
Publication Date:
October 17, 2013
Filing Date:
July 05, 2013
Export Citation:
Assignee:
Mitsubishi Paper Mills Co., Ltd.
International Classes:
G03F7/38; H05K3/06