【発明の名称】酸化物超電導薄膜

Japanese Patent JP3253297

B2

An oxide superconducting thin film formed by laser ablation comprises a matrix formed of c-axis oriented superconducting phases and foreign phases which are different in crystal orientation from the matrix. In order to improve critical current density of the oxide superconducting thin film, preferably selected are such conditions that the size of each superconducting phase in its a-b plane is not more than 0.1 mu m in diameter, the size of each superconducting phase along its c-axis direction is equal to the thickness of the oxide superconducting thin film, the foreign phases at least partially pass through the oxide superconducting thin film along the direction of thickness, the size of each foreign phase is at least 0.01 mu m and not more than 5 mu m in diameter, each foreign phase has an a-axis or a c-axis perpendicularly-oriented with respect to the major surface of the oxide superconducting thin film, and the like.

Satoru Takano
Shigeru Okuda
Noriyuki Yoshida
Tsukushi Hara
Kiyoshi Okaniwa
Takahiko Yamamoto

JP31197690A

February 04, 2002

November 16, 1990

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Sumitomo Electric Industries, Ltd.
THE TOKYO ELECTRIC POWER COMPANY,INCORPORATED

C01B13/14; C01G1/00; C01G3/00; C23C14/08; C23C14/28; C30B28/12; C30B29/22; H01L39/02; H01L39/24; (IPC1-7): C30B29/22

ＹＯＳＨＩＤＡ Ｎ．ｅｔ ａｌ．，，Ｐｒｅｐａｒａｔｉｏｎ ｏｆ Ｙ−Ｂａ−Ｃｕ−Ｏ ｓｕｐｅｒｃｏｎｄｕｃｔｉｎｇ ｆｉｌｍｓ ｂｙ ｅｘｃｉｍｅｒ ｌａｓｅｒ ａｂｌａｔｉｏｎ，Ｐｒｏｃｅｅｄｉｎｇｓ，ｏｆ ｔｈｅ ２ｎｄ Ｉｎｅｒｎａｔｉｏｎａｌ Ｓｙｍｐｏｓｉｕｍ ｏｎ Ｓｕｐｅｒｃｏｎｄｕｃｔｉｖｉｔｙ（ＩＳＳ ’８９），日本，ｐｐ．８５３−８５６，Ｎｏｖｅｍｂｅｒ １４−１７ １９８９，Ｔｓｕｋｕｂａ

Fukami Hisaro (2 outside)

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