Title:
【発明の名称】電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JP3316537
Kind Code:
B2
Inventors:
Tetsuya Suemitsu
Takatomo Enoki
Takatomo Enoki
Application Number:
JP2394395A
Publication Date:
August 19, 2002
Filing Date:
February 13, 1995
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
H01L29/812; H01L21/338; (IPC1-7): H01L21/338; H01L29/812
Domestic Patent References:
| JP4267345A | ||||
| JP45833A | ||||
| JP3278544A | ||||
| JP6283553A | ||||
| JP6213063A |
Attorney, Agent or Firm:
Masaki Yamakawa