Title:
【発明の名称】セラミックス部材の洗浄方法及び洗浄装置
Document Type and Number:
Japanese Patent JP3332915
Kind Code:
B1
Inventors:
Toshihiro Kaminaga
Application Number:
JP2001120991A
Publication Date:
October 07, 2002
Filing Date:
April 19, 2001
Export Citation:
Assignee:
Sanko Co., Ltd.
International Classes:
H01L21/304; B08B7/00; C04B41/53; C04B41/91; (IPC1-7): H01L21/304
Domestic Patent References:
| JP864573A | ||||
| JP5335256A | ||||
| JP8255778A |
Attorney, Agent or Firm:
Ryuji Takahashi (1 outside)