Title:
【発明の名称】光学素子
Document Type and Number:
Japanese Patent JP3335134
Kind Code:
B2
Abstract:
An optical element includes a first substrate having a diffractive surface or a surface structure with a surface level difference, a second substrate for covering the diffractive surface or the surface structure to provide a shield therefor, and a groove provided at the diffractive surface or the surface structure, and extending from a central portion to a peripheral portion thereof, for discharging or replacing a gas at the diffractive surface or the surface structure therethrough.
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Inventors:
Hideo Kato
Hiroshi Maehara
Hiroshi Maehara
Application Number:
JP8250099A
Publication Date:
October 15, 2002
Filing Date:
March 25, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G02B3/08; G02B5/18; G03F7/20; (IPC1-7): G02B5/18; G02B3/08; H01L21/027
Domestic Patent References:
| JP59128575A |
Attorney, Agent or Firm:
Yukihiko Hibiya