Title:
【発明の名称】位置合わせ方法及び装置ならびに露光方法及び装置
Document Type and Number:
Japanese Patent JP3336505
Kind Code:
B2
Inventors:
Kenji Nishi
Application Number:
JP32890491A
Publication Date:
October 21, 2002
Filing Date:
December 12, 1991
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): H01L21/027; G03F9/00; H01L21/68
Domestic Patent References:
| JP63178539A | ||||
| JP1278721A | ||||
| JP1235954A | ||||
| JP48426U |