Title:
【発明の名称】電子線描画装置
Document Type and Number:
Japanese Patent JP3340495
Kind Code:
B2
Inventors:
Atsushi Tominaga
Takeshi Kano
Takeshi Kano
Application Number:
JP4331793A
Publication Date:
November 05, 2002
Filing Date:
February 08, 1993
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G21K5/04; H01J37/04; H01J37/305; (IPC1-7): H01J37/04; H01J37/305
Domestic Patent References:
| JP3133039A | ||||
| JP2109244A | ||||
| JP25346A | ||||
| JP61190839A | ||||
| JP26084A |
Attorney, Agent or Firm:
Itami Masaru