Title:
【発明の名称】磁気インピーダンスヘッドモジュール
Document Type and Number:
Japanese Patent JP3360172
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a magnetic impedance head module which is small-sized and fine and has an excellent sensitivity characteristic for detecting micro- magnetic field and reliability at a low cost. SOLUTION: The back face section 30a of a substrate 30 mounted with a thin film MI element 15A is faced to a measured object 3, and roundness 35 is applied to the corner sections and the side sections of the back face section 30a. The thin film MI element 15A is kept in smooth contact with the measured object 3, the smooth movement of the measured object 3 is secured, and good detection, i.e., improved reliability, can be achieved. A negative feedback coil 12 and a bias coil 13 are wound on a thin film magnetic core 14, and an impedance element is made a thin film to form the thin film MI element 15A. Since the thin film MI element 15A is formed with a thin film, it can be miniaturized.
Inventors:
Tamio Umehara
Akio Takayama
Akiyo Yuguchi
Hideki Kato
Akio Takayama
Akiyo Yuguchi
Hideki Kato
Application Number:
JP2000141454A
Publication Date:
December 24, 2002
Filing Date:
May 15, 2000
Export Citation:
Assignee:
Minebea Co., Ltd.
International Classes:
G01R33/02; H01L43/00; (IPC1-7): G01R33/02; H01L43/00
Domestic Patent References:
| JP200055996A |
Attorney, Agent or Firm:
Nobuo Kaida (3 outside)