Title:
【発明の名称】強誘電体キャパシタの分極特性評価方法
Document Type and Number:
Japanese Patent JP3361268
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To evaluate a polarization characteristic with high reliability in a short time by electrically connecting a second electrode of a ferroelectric capacitor on a semiconductor substrate and a first electrode of a capacity known reference capacitor through a switch. SOLUTION: A ferroelectric capacitor 100 to be measured, pulse generators 102, 103, a capcity known reference capacitor 101 and electric switches 107, 108, are formed on a semiconductor substrate 99. While electrodes 100a, 100b of the capacitor 100 and output electrodes 102a, 103a of the pulse generators 102, 103 are electrically connected, an electrode 100b of the ferroelectric capacitor 100 and an electrode 101a of the reference capacitor 101 are electrically connected through the switch 108. In an output voltage pulse from the pulse generators 102 103, at least one can be adjused in a pulse width. Therefore, stray capacity of wiring is reduced, a voltage pulse having, for example, a pulse width not more than 100 ns can be impressed on the ferroelectric capacitor, and a polarization characteristic can be evaluated with high accuracy.
Inventors:
Masato Takeo
Application Number:
JP5831998A
Publication Date:
January 07, 2003
Filing Date:
March 10, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01R27/00; G01N27/60; G01R27/26; G01R29/24; G01R31/00; G11C11/22; G11C14/00; H01L21/66; H01L21/8246; H01L21/8247; H01L27/10; H01L27/105; H01L29/788; H01L29/792; (IPC1-7): G01R31/00; G01N27/60; G01R27/26; G01R29/24; H01L21/66
Domestic Patent References:
| JP6249900A | ||||
| JP5119094A | ||||
| JP11174098A | ||||
| JP9129694A | ||||
| JP59157577A | ||||
| JP5741109B2 |
Attorney, Agent or Firm:
Tadashi Hagino (3 outside)