Title:
【発明の名称】光学式計測装置及び露光装置
Document Type and Number:
Japanese Patent JP3365571
Kind Code:
B2
Abstract:
An optical measuring apparatus includes an environmental chamber which has a blowing opening to which a temperature-controlled gas is supplied from an external device and an exhaust opening for exhausting the air outside the environmental chamber, a light-emitting unit for irradiating a light beam onto an object to be measured arranged in the environmental chamber, a light-receiving unit for receiving the light beam reflected by the object to be measured, and outputting a signal corresponding to a position of the object to be measured. A heat source is provided in the environmental chamber and forms an air layer having a temperature higher than the gas immediately after the gas is supplied from the blowing opening. There is provided a partitioning wall which is arranged between an optical path of the light beam and the heat source to divide a flow of the gas.
Inventors:
Saburo Kamiya
Application Number:
JP28078893A
Publication Date:
January 14, 2003
Filing Date:
November 10, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; G03F7/20; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G03F9/00; H01L21/68
Domestic Patent References:
| JP5283313A | ||||
| JP21505A | ||||
| JP420803A | ||||
| JP61123533U |
Attorney, Agent or Firm:
Satoshi Ohmori