Title:
【発明の名称】膜厚測定方法及び膜の製造方法
Document Type and Number:
Japanese Patent JP3366525
Kind Code:
B2
Inventors:
Naoki Awaji
古宮 ▲聡▼
Shunji Kashiwagi
古宮 ▲聡▼
Shunji Kashiwagi
Application Number:
JP14266596A
Publication Date:
January 14, 2003
Filing Date:
June 05, 1996
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01B15/02; B01J19/00; G01B15/08; G01R23/16; H01L21/203; H01L21/205; H01L21/302; H01L21/66; H05K3/00; (IPC1-7): G01B15/02; B01J19/00; G01R23/16; H01L21/203; H01L21/205; H01L21/302; H01L21/66; H05K3/00
Domestic Patent References:
| JP8254509A | ||||
| JP6221841A | ||||
| JP4340407A |
Attorney, Agent or Firm:
Yoshito Kitano