Title:
【発明の名称】薄膜磁気ヘッド用ウエハ
Document Type and Number:
Japanese Patent JP3374927
Kind Code:
B2
Abstract:
PURPOSE:To provide the wafer which is high in the efficiency of utilizing thin- film magnetic conversion elements and is effective for improving the yield and reducing the cost. CONSTITUTION:This wafer includes a wafer substrate 1, the thin-film magnetic conversion elements 2 and reference markers 3. The thin-film magnetic conversion elements 2 are arranged like a grid on one surface side of the wafer substrate 1 so as to form rows and columns by plural pieces thereof. The reference markers 3 are provided in the direction parallel with the rows of the thin-film magnetic conversion elements 2 on one surface side of the wafer substrate 1 and are exposed on cut surfaces when the wafer substrate 1 is cut for each of the respective columns of the thin-film magnetic conversion elements 2.
Inventors:
Satoshi Ueshima
Application Number:
JP33657292A
Publication Date:
February 10, 2003
Filing Date:
November 24, 1992
Export Citation:
Assignee:
TDK Co., Ltd.
International Classes:
G11B5/31; H01L43/02; (IPC1-7): G11B5/31; H01L43/02
Domestic Patent References:
| JP6273409A | ||||
| JP61117717A | ||||
| JP432012A | ||||
| JP5258237A | ||||
| JP589432A |
Attorney, Agent or Firm:
Yoshijiro Abe