Title:
【発明の名称】表面分析装置
Document Type and Number:
Japanese Patent JP3374929
Kind Code:
B2
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Inventors:
Naomasa Niwa
Application Number:
JP6044393A
Publication Date:
February 10, 2003
Filing Date:
March 19, 1993
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H01J37/20; (IPC1-7): H01J37/20
Domestic Patent References:
| JP63198247A | ||||
| JP619842U |
Attorney, Agent or Firm:
Akio Shionoiri