Title:
【発明の名称】投影露光方法及び装置、並びに素子製造方法
Document Type and Number:
Japanese Patent JP3375076
Kind Code:
B2
Inventors:
Yuji Imai
Application Number:
JP2000116479A
Publication Date:
February 10, 2003
Filing Date:
April 18, 2000
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP4196513A | ||||
| JP63128713A | ||||
| JP6144429A | ||||
| JP61232616A | ||||
| JP58202449A | ||||
| JP4235558A | ||||
| JP3101215A | ||||
| JP472609A | ||||
| JP6370420A | ||||
| JP265222A | ||||
| JP6177001A | ||||
| JP6243128A | ||||
| JP6291016A |
Attorney, Agent or Firm:
Satoshi Ohmori