Title:
【発明の名称】研磨材および研磨材を用いた研磨方法
Document Type and Number:
Japanese Patent JP3376334
Kind Code:
B2
More Like This:
Inventors:
Kenji Yamashita
Application Number:
JP36359199A
Publication Date:
February 10, 2003
Filing Date:
December 22, 1999
Export Citation:
Assignee:
Yamashita Works Co., Ltd.
International Classes:
B24C1/00; B24C11/00; C09K3/14; (IPC1-7): C09K3/14; B24C1/00; B24C11/00
Domestic Patent References:
| JP7164324A | ||||
| JP5117635A | ||||
| JP1148151A | ||||
| JP6246638A | ||||
| JP9314468A | ||||
| JP11100590A | ||||
| JP860176A | ||||
| JP857848A |
Attorney, Agent or Firm:
Toshihide Kodama