Title:
【発明の名称】露光装置
Document Type and Number:
Japanese Patent JP3377053
Kind Code:
B2
Inventors:
Kazuaki Suzuki
Application Number:
JP23460893A
Publication Date:
February 17, 2003
Filing Date:
September 21, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP61247025A | ||||
| JP60232552A | ||||
| JP4196513A |
Attorney, Agent or Firm:
Satoshi Ohmori