Title:
【発明の名称】粒子密度計測装置
Document Type and Number:
Japanese Patent JP3377625
Kind Code:
B2
Abstract:
PURPOSE: To obtain the entire amt. of resonance particles by shifting a light frequency to the range of a resonance frequency broadened due to Doppler effect afforded by the particles and further by integrating an optical axial velocity profile on resonance particles toward the amt. of the resonance particles. CONSTITUTION: A metal evaporation device serving as an evaporation source 2 is mounted in a vacuum vessel 1. A quartz oscillation type film thickness meter 15 is suspended above the evaporation source 2. In addition, an incident window 11 and an outgoing window 12 are provided through the vessel 1. Light transmittance is successively calculated with a light frequency from a light source 4 changed to obtain the relations between the light frequency and transmittance. The amt. of metal vapor absorbed resonance light is obtained from the light transmittance, using a light absorption cross section, etc., an intrinsic physical value of the metal vapor. The axial velocity of the metal vapor is obtained from the frequency, using the intrinsic resonance frequency of the metal vapor, etc. The relational expression of the number of resonance particles and optical axial light velocity is applied to the relations between the light transmittance and frequency obtained through measurement. An optical axial velocity profile on the number of particles is obtained for integration with the optical axial velocity.
Inventors:
Akihiro Kanagawa
Application Number:
JP27746394A
Publication Date:
February 17, 2003
Filing Date:
November 11, 1994
Export Citation:
Assignee:
THE TOKYO ELECTRIC POWER COMPANY,INCORPORATED
Chubu Electric Power Co., Inc.
Tohoku Electric Power Co., Inc.
Kansai Electric Power Co., Inc.
Shikoku Electric Power Co., Inc.
Chugoku Electric Power Co., Inc.
Hokkaido Electric Power Company
Hokuriku Electric Power Co., Inc.
Kyushu Electric Power Co., Inc.
Japan Atomic Power Company
Japan Nuclear Fuel Co., Ltd.
CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
MITSUBISHI HEAVY INDUSTRIES,LTD.
Chubu Electric Power Co., Inc.
Tohoku Electric Power Co., Inc.
Kansai Electric Power Co., Inc.
Shikoku Electric Power Co., Inc.
Chugoku Electric Power Co., Inc.
Hokkaido Electric Power Company
Hokuriku Electric Power Co., Inc.
Kyushu Electric Power Co., Inc.
Japan Atomic Power Company
Japan Nuclear Fuel Co., Ltd.
CENTRAL RESEARCH INSTITUTE OF ELECTRIC POWER INDUSTRY
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G01N9/00; G01N9/24; G01N15/14; G01N21/31; G01N15/00; (IPC1-7): G01N9/24; G01N9/00; G01N21/31
Domestic Patent References:
| JP5256769A | ||||
| JP510873A |
Attorney, Agent or Firm:
Toshiro Mitsuishi (3 others)
Toshiro Mitsuishi (1 person outside)
Toshiro Mitsuishi (1 person outside)