Title:
【発明の名称】マスク保護装置の製造方法における薄膜の切断方法と、該方法で用いる切断治具
Document Type and Number:
Japanese Patent JP3377735
Kind Code:
B2
Inventors:
Minoru Fujita
Hiroyuki Kurata
Masahiro Kondo
Hiroaki Nakagawa
Hiroyuki Kurata
Masahiro Kondo
Hiroaki Nakagawa
Application Number:
JP28591297A
Publication Date:
February 17, 2003
Filing Date:
October 17, 1997
Export Citation:
Assignee:
Mitsui Chemicals, Inc.
International Classes:
G03F1/62; H01L21/027; H01L21/301; (IPC1-7): G03F1/14; H01L21/027
Domestic Patent References:
| JP8292553A | ||||
| JP895234A | ||||
| JP2145292A | ||||
| JP7281421A |
Attorney, Agent or Firm:
Koichi Sato