Title:
【発明の名称】投影露光装置
Document Type and Number:
Japanese Patent JP3381334
Kind Code:
B2
Abstract:
A projection exposure apparatus has a magnifying projection optical system for projecting a magnified image of an original on a photosensitive substrate, a first position detecting element for detecting a position of the original, a second position detecting element for detecting a position of the photosensitive substrate, and a drive device for moving the original and the photosensitive substrate in a predetermined relationship relative to the magnifying projection optical system. The drive device performs the movements on the basis of results of the first and second position detecting elements.
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Inventors:
Susumu Mori
Application Number:
JP26228993A
Publication Date:
February 24, 2003
Filing Date:
October 20, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; G03B27/42; G03F7/20; H01L21/027; F02B75/02; (IPC1-7): H01L21/027; G03F7/20; G03F9/00
Domestic Patent References:
| JP62122126A | ||||
| JP4196513A | ||||
| JP2310912A | ||||
| JP710930A | ||||
| JP4104255A | ||||
| JP4365315A | ||||
| JP63293547A |