Title:
【発明の名称】真空薄膜形成装置
Document Type and Number:
Japanese Patent JP3384055
Kind Code:
B2
Inventors:
Hiroshi Nakamura
Katsuhiko Murakami
Katsuhiko Murakami
Application Number:
JP23759093A
Publication Date:
March 10, 2003
Filing Date:
September 24, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
C23C14/22; H01L21/00; H01L21/02; H01L21/203; (IPC1-7): H01L21/203; C23C14/22
Domestic Patent References:
| JP1270321A | ||||
| JP586467A | ||||
| JP63279447A | ||||
| JP331473A |