Title:
【発明の名称】イオンビームガン
Document Type and Number:
Japanese Patent JP3414398
Kind Code:
B2
Abstract:
The present invention discloses an ion beam gun wherein the ions are produced by radio-frequency excitation. A plasma is created in a vessel, or chamber, by ionizing gas molecules by means of a coil about the outside of the vessel. The coil receives radio-frequency energy which ionizes the gas molecules. The inside of the vessel contains an anode and resonator to assist in shaping and containing the plasma. The resonator acts as an internal electrode to produce eddy currents generated by the radio-frequency energy to enhance the plasma. A multi-apertured screen grid also helps contain and shape the plasma within the chamber while a multi-apertured accelerator grid is used to extract the ions from the ion beam gun.
Inventors:
Arhonen, Robert Giy
Application Number:
JP51245893A
Publication Date:
June 09, 2003
Filing Date:
December 11, 1992
Export Citation:
Assignee:
Honeywell Incorporated
International Classes:
H01J27/16; H01J27/18; H01J37/08; (IPC1-7): H01J37/08; H01J27/16
Domestic Patent References:
| JP4290428A | ||||
| JP3110737A | ||||
| JP2148539A | ||||
| JP62180747A | ||||
| JP63103088A | ||||
| JP3297098A | ||||
| JP28132U | ||||
| JP262650U |
Other References:
【文献】米国特許3798568(US,A)
【文献】米国特許3432721(US,A)
【文献】米国特許3432721(US,A)
Attorney, Agent or Firm:
Masaki Yamakawa (5 outside)