Title:
窒化物系化合物半導体及びその製造方法
Document Type and Number:
Japanese Patent JP3549151
Kind Code:
B2
Inventors:
Nobuaki Teraguchi
Application Number:
JP7689099A
Publication Date:
August 04, 2004
Filing Date:
March 19, 1999
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L21/205; H01L21/203; (IPC1-7): H01L21/205; H01L21/203
Domestic Patent References:
| JP11004018A | ||||
| JP63184324A | ||||
| JP7263749A | ||||
| JP8274370A |
Attorney, Agent or Firm:
Hidesaku Yamamoto