Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3552660
Kind Code:
B2
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Inventors:
Tadahiko Sakai
Application Number:
JP2000314870A
Publication Date:
August 11, 2004
Filing Date:
October 16, 2000
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/60; H01L21/56; (IPC1-7): H01L21/60
Domestic Patent References:
JP9213830A | ||||
JP2000100874A | ||||
JP8222572A | ||||
JP11274241A | ||||
JP11111755A |
Foreign References:
WO1998030073A1 |
Attorney, Agent or Firm:
Fumio Iwahashi
Tomoyasu Sakaguchi
Hiroki Naito
Tomoyasu Sakaguchi
Hiroki Naito