Title:
回転偏差測定装置および回転偏差測定方法
Document Type and Number:
Japanese Patent JP3557951
Kind Code:
B2
Inventors:
Hiroyasu Furukawa
Takashi Shirase
Masamitsu Okamura
Carpenter Hiromi
Kurokawa Noboru
Takashi Shirase
Masamitsu Okamura
Carpenter Hiromi
Kurokawa Noboru
Application Number:
JP20597099A
Publication Date:
August 25, 2004
Filing Date:
July 21, 1999
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01J9/42; G01B11/26; (IPC1-7): H01J9/42; G01B11/26
Domestic Patent References:
| JP10083763A |
Attorney, Agent or Firm:
Kaneo Miyata
Yahei Takase
Yahei Takase