Title:
スパッタ膜の製造装置およびスパッタ膜の製造方法
Document Type and Number:
Japanese Patent JP3566528
Kind Code:
B2
Inventors:
Masayasu Futagawa
Kiyoshi Mito
Kiyoshi Mito
Application Number:
JP4503498A
Publication Date:
September 15, 2004
Filing Date:
February 26, 1998
Export Citation:
Assignee:
Sharp Corporation
International Classes:
C23C14/00; C23C14/34; C23C14/56; H01L21/203; (IPC1-7): C23C14/34; C23C14/00; C23C14/56; H01L21/203
Domestic Patent References:
| JP3120362A | ||||
| JP5086475A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai