半導体ウェファの局在準位測定装置及び方法

Title:

半導体ウェファの局在準位測定装置及び方法

Document Type and Number:

Japanese Patent JP3566648

Kind Code:

B2

Inventors:

Masatake Kishino
Haruhiko Yoshida

Application Number:

JP2000338823A

Publication Date:

September 15, 2004

Filing Date:

November 07, 2000

Export Citation:

Assignee:

Hyogo prefecture
Japan Society for the Promotion of Science

International Classes:

G01N27/00; H01L21/66; (IPC1-7): H01L21/66; G01N27/00

Domestic Patent References:

Attorney, Agent or Firm:

Kosaku Sugimura

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