Title:
有機金属の充填方法
Document Type and Number:
Japanese Patent JP3582118
Kind Code:
B2
Inventors:
Yasuo Oga
Shinichi Sawada
Shinichi Sawada
Application Number:
JP31995494A
Publication Date:
October 27, 2004
Filing Date:
December 22, 1994
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
B65B31/00; B01J4/00; C30B25/14; H01L21/205; (IPC1-7): C30B25/14; B01J4/00; B65B31/00; H01L21/205
Domestic Patent References:
| JP7058023A | ||||
| JP1055820A | ||||
| JP63055194A |
Attorney, Agent or Firm:
Takashi Kuboyama