Title:
レジストパターン予測方法
Document Type and Number:
Japanese Patent JP3583622
Kind Code:
B2
Inventors:
Sanbongi Shoji
Toru Koike
Toru Koike
Application Number:
JP22463098A
Publication Date:
November 04, 2004
Filing Date:
August 07, 1998
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP10103932A | ||||
| JP8248614A | ||||
| JP2003186174A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Atsushi Tsuboi
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Atsushi Tsuboi
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai