誘電体分離ウェーハの製造方法 - Mitsubishi Sumitomo Silicon Co., Ltd.

Title:

誘電体分離ウェーハの製造方法

Document Type and Number:

Japanese Patent JP3601764

Kind Code:

B2

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Inventors:

Hiroyuki Oi
Kazuya Sato
Hiroshi Shimamura

Application Number:

JP36762598A

Publication Date:

December 15, 2004

Filing Date:

December 24, 1998

Export Citation:

Assignee:

Mitsubishi Sumitomo Silicon Co., Ltd.

International Classes:

H01L21/76; H01L21/02; H01L21/18; H01L21/762; H01L27/12; (IPC1-7): H01L21/76; H01L21/762

Domestic Patent References:

JP61120424A

Attorney, Agent or Firm:

Ichiro Abe

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