Title:
堆積膜形成装置および堆積膜形成方法
Document Type and Number:
Japanese Patent JP3610332
Kind Code:
B2
Inventors:
Yukito Aota
Masahiro Kanai
Takao Hideo
Masahiro Kanai
Takao Hideo
Application Number:
JP2001321085A
Publication Date:
January 12, 2005
Filing Date:
October 18, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
C23C16/505; H01L21/205; (IPC1-7): H01L21/205; C23C16/505
Domestic Patent References:
| JP2000284262A | ||||
| JP5010818B2 |
Attorney, Agent or Firm:
Tatsuya Nagao