基板熱処理装置 - Dainippon Screen Mfg. Co., Ltd.

Title:

基板熱処理装置

Document Type and Number:

Japanese Patent JP3621804

Kind Code:

B2

More Like This:

JP2005106899	IMAGE PROJECTION DEVICE
JP2006119240	ELECTROOPTICAL DEVICE AND ELECTRONIC EQUIPMENT
JP4194377	Method for manufacturing optical functional elements

Inventors:

Akihiro Hisai
Noriaki Matsunaga

Application Number:

JP13832997A

Publication Date:

February 16, 2005

Filing Date:

May 28, 1997

Export Citation:

Assignee:

Dainippon Screen Mfg. Co., Ltd.

International Classes:

G02F1/13; G02F1/1333; H01L21/027; H01L21/677; H01L21/68; (IPC1-7): H01L21/027; G02F1/13; G02F1/1333; H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita

Previous Patent: 緩衝機構を有する車両ロック装置

Next Patent: 流動層焼却炉における燃焼制御方法