Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3625366
Kind Code:
B2
Inventors:
Naofumi Nakamura
Noriaki Matsunaga
Noriaki Matsunaga
Application Number:
JP35801897A
Publication Date:
March 02, 2005
Filing Date:
December 25, 1997
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/768; H01L21/82; (IPC1-7): H01L21/768; H01L21/82
Domestic Patent References:
| JP2210870A | ||||
| JP9120992A | ||||
| JP9036240A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Sadao Muramatsu
Ryo Hashimoto