Title:
反射防止膜形成用組成物
Document Type and Number:
Japanese Patent JP3743134
Kind Code:
B2
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Inventors:
Kazuo Kawaguchi
Motoyuki Shima
Ken Sugimoto
Shinichiro Iwanaga
Motoyuki Shima
Ken Sugimoto
Shinichiro Iwanaga
Application Number:
JP21576597A
Publication Date:
February 08, 2006
Filing Date:
July 25, 1997
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C08L67/02; C09D5/00; C09D167/02; C09D167/08; G03F7/20
Domestic Patent References:
| JP8012786A |
Attorney, Agent or Firm:
Shuji Iwamiya