Title:
絶縁膜の評価方法
Document Type and Number:
Japanese Patent JP3751396
Kind Code:
B2
Inventors:
Naoko Otani
Yasuhiro Kimura
Shunji Katayama
Yasuhiro Kimura
Shunji Katayama
Application Number:
JP4791197A
Publication Date:
March 01, 2006
Filing Date:
March 03, 1997
Export Citation:
Assignee:
Renesas Technology Corp.
International Classes:
H01L21/66; H01L21/316
Domestic Patent References:
| JP56087338A |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita
Previous Patent: EQUIPMENT FOR SUPPLYING ARTICLE TO PACKAGING MACHINE AND ITS METHOD
Next Patent: HEAT-DISSIPATING STRUCTURE OF ELECTRONIC APPARATUS
Next Patent: HEAT-DISSIPATING STRUCTURE OF ELECTRONIC APPARATUS