Title:
電子ビーム照射反応装置
Document Type and Number:
Japanese Patent JP3895927
Kind Code:
B2
Abstract:
The present invention relates to an electron beam-irradiating reaction apparatus for irradiating a desired object to be treated, such as an exhaust gas, with an electron beam. Conventionally, a scanning tube of an electron beam irradiation device and a reaction device for receiving the electron beam are rigidly connected. Therefore, excessive stress is applied to a connecting portion between the scanning tube and the reaction device and not only leakage of gas from the connecting portion, but also breakage of a metal window foil provided at an end portion of the scanning tube are likely to occur. In the present invention, to solve such problems, a flexible hermetic sealing member 23 is provided between a portion around the end portion of the scanning tube 12 and a peripheral edge 18a of an electron beam receiving window in a side wall of an electron beam reaction device 18.
Inventors:
Yoshitaka Doi
Masao Nomoto
Kazuaki Hayashi
Masahiro Izutsu
Koji Kageyama
Kyoichi Okamoto
Masao Nomoto
Kazuaki Hayashi
Masahiro Izutsu
Koji Kageyama
Kyoichi Okamoto
Application Number:
JP2000594126A
Publication Date:
March 22, 2007
Filing Date:
January 11, 2000
Export Citation:
Assignee:
Ebara Corporation
International Classes:
G21K5/04; B01D53/32; B01D53/60; B01J19/12; G21K5/10; H01J33/04
Domestic Patent References:
| JP8166497A | ||||
| JP9133799A | ||||
| JP9145900A | ||||
| JP9171098A |
Attorney, Agent or Firm:
Kazuo Shamoto
Akio Chiba
Shigeru Ito
Fujihiro Kanda
Hiroyuki Uchida
Toru Miyamae
Akio Chiba
Shigeru Ito
Fujihiro Kanda
Hiroyuki Uchida
Toru Miyamae