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Title:
高効率超純度流体ヒータのための要求予測制御システム
Document Type and Number:
Japanese Patent JP3929699
Kind Code:
B2
Abstract:
A control system for an in-line, ultra-pure deionized water (UPDI) heater including a housing, at least one fluid pathway through the housing, and a resistive heating element proximate the fluid pathway for heating an operating fluid flowing through the pathway. The control system includes a mechanism for determining an actual power value which is indicative of the power being applied to the resistive heating element, a mechanism for determining a needed power value which is indicative of the power required to achieve an outlet fluid temperature substantially equal to a user-selectable preset fluid temperature, a mechanism for adjusting the actual power applied to the resistive heating element based on an offset between the actual power value and the needed power value, and a mechanism for overriding the adjusting mechanism when the offset is greater than a predetermined level.

Inventors:
Zenios Theofani
Bass Howard Jay
Application Number:
JP2000529107A
Publication Date:
June 13, 2007
Filing Date:
January 22, 1999
Export Citation:
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Assignee:
Tom Richards Incorporated DBA Process Technology
International Classes:
F24H1/10; F24H9/20; G05D23/19
Domestic Patent References:
JP9145156A
JP9049660A
JP9274987A
Foreign References:
US5438642
Attorney, Agent or Firm:
Hiroo Suzuki