Title:
圧電共振子およびその製造方法
Document Type and Number:
Japanese Patent JP3933195
Kind Code:
B2
Abstract:
TO reduce frequency variations caused by a change in frequency constant and suppress unnecessary vibrations in the case where the frequency constant of apiezoelectric substrate has a gradient. A piezoelectric resonator has vibrating electrodes 4 and 5 facing each other, which are formed on two major surfaces of apiezoelectric substrate Ia, and trapped vibrations are generated between the two vibrating electrodes. The piezoelectric substrate Ia has a constant thickness. The frequency constant of the piezoelectric substrate Ia has a gradient in a surface direction. The vibrating electrodes 4 and 5 are formed to have a gradient thickness so that the thickness gradually increases as the frequency constant of the piezoelectric substrate increases. By forming the vibrating electrodes to have a gradient thickness, unnecessary in-band vibrations are suppressed, and frequency variations are reduced.
Inventors:
Masakazu Yoshio
Koichi Yamazaki
Koichi Yamazaki
Application Number:
JP2007501538A
Publication Date:
June 20, 2007
Filing Date:
January 25, 2006
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/17; H01L41/09; H01L41/187; H01L41/22; H01L41/29; H03H3/02
Domestic Patent References:
| JP62239707A | ||||
| JP2002299982A | ||||
| JP2003115741A |
Attorney, Agent or Firm:
Hidetaka Tsutsui