Title:
超音波洗浄装置
Document Type and Number:
Japanese Patent JP3974678
Kind Code:
B2
Inventors:
Matsuzaki Nobuki
Application Number:
JP3914097A
Publication Date:
September 12, 2007
Filing Date:
February 24, 1997
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B08B3/12; B06B1/06; H01L21/304
Domestic Patent References:
| JP5031469A | ||||
| JP2277449A | ||||
| JP58166973A | ||||
| JP6296942A |
Attorney, Agent or Firm:
Takehiko Suzue
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Shoji Kawai