Title:
三フッ化窒素含有ガスの処理方法及びそのための処理剤
Document Type and Number:
Japanese Patent JP3986597
Kind Code:
B2
Abstract:
A waste gas stream containing toxic NF3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF4, MoF6 and WF6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300-600 DEG C. to remove the NF3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons
Inventors:
Itsuo Orihara
Moriyuki Fukushima
Eisaku Mogi
Shiro Yamashita
Moriyuki Fukushima
Eisaku Mogi
Shiro Yamashita
Application Number:
JP27235396A
Publication Date:
October 03, 2007
Filing Date:
October 15, 1996
Export Citation:
Assignee:
Kanto Denka Kogyo Co., Ltd.
International Classes:
B01D53/68; A62D3/00; B01D53/34
Domestic Patent References:
| JP7265663A | ||||
| JP4265113A | ||||
| JP7132211A | ||||
| JP5237324A | ||||
| JP4502726A |
Attorney, Agent or Firm:
Kazuo Shamoto
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Takeshi Kano
Shosuke Imai
Tadashi Masui
Tadahiko Kurita
Yasushi Kobayashi
Takeshi Kano