To provide a manufacturing method capable of obtaining an actuator with a highly accurate arm length.
First, a joined body 20 is obtained by joining a pair of silicon plates 40a, 40b to both surfaces of a glass plate 30 having a slit opening 31. Then, the joined body 20 is cut along the longitudinal direction of the opening 31. At this time, the cutting is performed on surfaces passed through the areas of the silicon plates 40a, 40b which sandwich the opening 31. Then, for a base body 10 obtained by cutting the joined body 20, piezoelectric elements 50a, 50b are bonded to the outer surfaces of the silicon plates 40a, 40b, and then cutting is performed at a predetermined position. Thus, the actuator 2 having a pair of arms 17a, 17b connected via a connecting part 16 is obtained.
COPYRIGHT: (C)2005,JPO&NCIPI
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Shiro Terasaki
Toyotaka Abe