Title:
電解加工方法
Document Type and Number:
Japanese Patent JP3995463
Kind Code:
B2
Inventors:
Mitsuhiko Shiragashi
Masayuki Kasukawa
Hozumi Yasuda
Takeki Kobata
Masayuki Kasukawa
Hozumi Yasuda
Takeki Kobata
Application Number:
JP2001380641A
Publication Date:
October 24, 2007
Filing Date:
December 13, 2001
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B23H3/00; C25F3/00; B23H3/02; B23H3/10; B23H7/36; C25F3/02; C25F7/00; H01L21/306
Domestic Patent References:
| JP2001064799A | ||||
| JP1237197A | ||||
| JP2000345399A | ||||
| JP11350192A | ||||
| JP4362197A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori
Shintaro Hotta
Ryoji Kosugi
Tomohiro Mori