Title:
静電吸着装置
Document Type and Number:
Japanese Patent JP4010541
Kind Code:
B2
Inventors:
Shigeru Mizuno
Masahito Ishihara
Sunil Wickrumanayaka
Masahito Ishihara
Sunil Wickrumanayaka
Application Number:
JP2002177380A
Publication Date:
November 21, 2007
Filing Date:
June 18, 2002
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
H01L21/3065; H01L21/683; H01L21/31; H01L21/68; H02N13/00
Domestic Patent References:
| JP2001308166A | ||||
| JP10107132A | ||||
| JP11251416A | ||||
| JP10098092A | ||||
| JP9327188A |
Attorney, Agent or Firm:
Tamiya Hiroshi