Title:
吸着装置および吸着方法
Document Type and Number:
Japanese Patent JP4010543
Kind Code:
B2
Inventors:
Yuichi Eto
Shigeru Okani
Shigeru Okani
Application Number:
JP2002189158A
Publication Date:
November 21, 2007
Filing Date:
June 28, 2002
Export Citation:
Assignee:
Idemitsu Engineering Co., Ltd.
International Classes:
B01D53/04
Domestic Patent References:
| JP53001173A | ||||
| JP5237333A | ||||
| JP9164319A |
Attorney, Agent or Firm:
Intellectual Property Office
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki
Kinoshita Minoru
Kanji Nakayama
Tsuyoshi Ishizaki